I-China molybdenum wafer molybdenum sheet diamond kwi-CVD Manufacturer kunye noMboneleli |I-Tungsten eyenziwe

Iphepha ledayimani le-molybdenum molybdenum kwi-CVD

Inkcazelo emfutshane:

I-Molybdenum's high melting point, i-thermal conductivity kunye ne-inertness yekhemikhali yenza ukuba ifaneleke kwizicelo ze-CVD apho ukuzinza okuphezulu kweqondo lokushisa kunye nokuchasana nokuchaswa kweekhemikhali kubalulekile.La macandelo angasetyenziselwa ukuvelisa izixhobo ze-semiconductor, iingubo zefilimu ezibhityileyo kunye nezixhobo ezisekelwe kwidayimane kwiindidi zemveliso kunye nezicelo zophando.

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Ithini indlela yeCVD yeedayimani?

Indlela ye-chemical vapor deposition (CVD) yedayimane ibandakanya ukusebenzisa inkqubo yeekhemikhali ukudibanisa ifilimu yedayimani okanye ukwambathisa kwindawo elawulwayo.Ngale ndlela, umxube werhasi, odla ngokuqulatha iigesi zehydrocarbon ezifana ne-methane, ungeniswa kwigumbi lokusabela kunye ne-substrate imathiriyeli efana ne-molybdenum wafers okanye ii-wafers zedayimane.Irhasi iye isebenze ngeendlela ezahlukeneyo, ezinje ngobushushu okanye iplasma, ukudiliza iimolekyuli zehydrocarbon kwaye ifake iiathom zekhabhoni kwi-substrate, okukhokelela ekukhuleni kweekristale zedayimani.

Inkqubo ye-CVD yedayimani inika iingenelo ezininzi, kubandakanywa ukukwazi ukuvelisa iingubo zedayimani eziphezulu kunye nolawulo oluchanekileyo lobunzima, ukufana kunye nokubunjwa.Ikwavumela ukubekwa kweefilimu zedayimani kwiintlobo ngeentlobo zezixhobo zesubstrate, ivumela ukuyilwa kweendawo ezigqunywe ngedayimani kwiintlobo ngeentlobo zemizi-mveliso kunye nezicelo zophando.

Lilonke, indlela ye-CVD yedayimani yindlela eguquguqukayo nesetyenziswa ngokubanzi ekuveliseni iifilimu zedayimani zokwenziwa kunye neengubo ezineepropathi ezilungiselelweyo, zibenza baxabiseke kumashishini afana ne-elektroniki, izixhobo zokusika, kunye neengubo ezixhathisayo.

Yintoni ubunzima bokugquma kweCVD?

Ubunzima beekhemikhali zokubeka umphunga (CVD) iingubo ezinokuthi zihluke ngokuxhomekeke kwizinto ezithile ezifakwe kunye neeparitha zenkqubo ezisetyenzisiweyo.Nangona kunjalo, iingubo ze-CVD zaziwa ngobunzima bazo obukhethekileyo, obuhlala bugqithisa kwizinto zokwaleka zesiqhelo zokubeka umphunga (PVD).

Kwiingubo zedayimani zeCVD, ubulukhuni buphawuleka ngokukodwa.Idayimani yenye yezona zinto zinzima zaziwayo, kunye ne-CVD idayimani yokwambathisa inobulukhuni obukhethekileyo obuhlala bugqitha kwezinye iintlobo zeengubo.Ukuqina kweengubo zedayimani ze-CVD ngokuqhelekileyo kulinganiswa kusetyenziswa isikali sobulukhuni beVickers kwaye sisuka kwi-8000 HV ukuya kwi-10000 HV, nto leyo eyenza ibe yenye yezona zinto zinzima kwaye zixhathisa ukunxitywa.

Kwezinye ii-coatings ze-CVD, ezifana ne-carbide okanye i-nitride-based coatings, ubunzima bunokuba buphezulu, bubonelele ngokugqwesileyo ukuxhatshazwa kunye nokuqina kwiindidi zezicelo zoshishino.

Ngokubanzi, iingubo ze-CVD zixabiswa ngenxa yobunzima bazo obukhethekileyo, okwenza ukuba zilungele izicelo apho ukuxhatshazwa kokugqoka, ukuzinza okuphezulu kobushushu, kunye nokusebenza kwexesha elide kubalulekile.