High kuchena Ion implantation tungsten filament
Ion implantation tungsten waya chinhu chakakosha chinoshandiswa mumashini ekuisa ion, kunyanya mukugadzira semiconductor. Rudzi urwu rwetungsten waya inoita basa rakakosha mumidziyo ye semiconductor, uye hunhu hwayo uye kuita kwayo kunokanganisa zvakananga kushanda kweIC process mitsara. Ion implantation muchina chinhu chakakosha mukugadzira maitiro eVLSI (Yakakura Yakanyanya Scale Yakabatanidzwa Circuit), uye basa retungsten waya seyo ion sosi haigone kufuratirwa. ,
| Dimensions | Semifananidzo yako |
| Nzvimbo Yekwakabva | Luoyang, Henan |
| Brand Name | FGD |
| Application | semiconductor |
| Surface | Ganda dema, alkali wash, mota inopenya, yakakwenenzverwa |
| Kuchena | 99.95% |
| Material | W1 |
| Density | 19.3g/cm3 |
| Kuuraya mitemo | GB/T 4181-2017 |
| Melting point | 3400 ℃ |
| Kusachena kwemukati | 0.005% |
| Main components | W＞99.95% |
| Kusachena kwemukati≤ | |
| Pb | 0.0005 |
| Fe | 0.0020 |
| S | 0.0050 |
| P | 0.0005 |
| C | 0.01 |
| Cr | 0.0010 |
| Al | 0.0015 |
| Cu | 0.0015 |
| K | 0.0080 |
| N | 0.003 |
| Sn | 0.0015 |
| Si | 0.0020 |
| Ca | 0.0015 |
| Na | 0.0020 |
| O | 0.008 |
| Ti | 0.0010 |
| Mg | 0.0010 |
1. Fekitari yedu iri muLuoyang City, Henan Province. Luoyang inzvimbo yekugadzira ye tungsten uye molybdenum migodhi, saka isu tine mabhenefiti akakwana mumhando uye mutengo;
2. Kambani yedu ine vashandi vehunyanzvi vane makore anopfuura gumi nemashanu echiitiko, uye isu tinopa zvakanangwa mhinduro uye mazano kune ega ega zvinodiwa nemutengi.
3. Zvose zvezvigadzirwa zvedu zvinoongororwa zvakasimba zvehutano zvisati zvatengeswa kunze kwenyika.
4. Kana ukagamuchira zvinhu zvisina kukwana, unogona kutibata nesu kuti tidzorere mari.
1.Raw zvinhu kusarudzwa
(Sarudza yakakwira-mhando tungsten zviwanikwa kuti uve nechokwadi chekuchena uye michina zvimiro zvechigadzirwa chekupedzisira.)
2. Kunyunguduka uye Kucheneswa
(Yakasarudzwa tungsten mbishi zvinhu zvinonyungudutswa munzvimbo inodzorwa kubvisa tsvina uye kuwana kuchena kwaunoda.)
3. Kudhirowa kwewaya
(Yakanatswa tungsten zvinhu zvinowedzerwa kana kudhonzwa kuburikidza nenhevedzano yekufa kuti uwane inodiwa waya dhayamita uye michina zvinhu.)
4.Annealing
(Iyo tungsten wire yakadhonzwa inovharirwa kubvisa kushushikana kwemukati uye kunatsiridza ductility uye mashandiro ekuita)
5. Ion Implantation Process
Muchiitiko ichi, tungsten filament pachayo inogona kuita ion implantation process, umo ion inoiswa mukati meiyo tungsten filament kuti ichinje maitiro ayo kuti iwedzere kushanda muiyo ion implanter.)
Mune semiconductor chip kugadzira maitiro, ion implantation muchina ndechimwe chemidziyo yakakosha inoshandiswa kutamisa chip circuit diagraph kubva kumasiki kuenda kune silicon wafer uye kuzadzisa chinangwa chechip basa. Iyi nzira inosanganisira matanho akadai semakemikari mechanical polishing, nhete yefirimu deposition, photolithography, etching, uye ion implantation, pakati peiyo ion implantation ndiyo imwe yenzira dzakakosha dzekuvandudza kushanda kwesilicon wafers. Iko kushandiswa kweion implantation michina inonyatso kudzora nguva uye mutengo wekugadzira chip, uku ichivandudza mashandiro uye kuvimbika kwemachipi. ,
Ehe, tungsten filaments inotapukirwa nekusvibiswa panguva yekuisirwa ion. Kusvibiswa kunogona kuitika nekuda kwezvikonzero zvakasiyana-siyana, senge magasi asara, zvimedu, kana tsvina iripo mukamuri yekuisirwa ion. Izvi zvinosvibisa zvinogona kunamatira pamusoro peiyo tungsten filament, zvichikanganisa kuchena kwayo uye zvinogona kukanganisa kuita kweiyo ion implantation process. Nokudaro, kuchengetedza nzvimbo yakachena uye inodzorwa mukati mekamuri yekuisa ion kunokosha kuti uderedze njodzi yekusvibiswa uye kuve nechokwadi chekuvimbika kwetungsten filament. Nguva dzose yekuchenesa uye kugadzirisa maitiro anogonawo kubatsira kudzikisira mukana wekusvibiswa panguva yekuisirwa ion.
Tungsten waya inozivikanwa nepamusoro pekunyunguduka kwayo uye yakanakisa mekiniki zvivakwa, izvo zvinoita kuti isamirire deformation pasi peyakajairika ion implantation mamiriro. Nekudaro, kupisa kunogadzirwa panguva ye-high-energy ion bombardment uye kuisirwa ion kunogona kukonzera kukanganisa nekufamba kwenguva, kunyanya kana maparamendi emaitiro asina kunyatsodzorwa.
Zvinhu zvakadai sekusimba uye nguva yeiyo danda uye tembiricha uye kushushikana mazinga anowanikwa netambo ye tungsten zvese zvinogona kubatsira mukugona kwe deformation. Pamusoro pezvo, chero kusachena kana kukanganisa mutambo ye tungsten kunowedzera kukanganisa kwe deformation.
Kuti uderedze njodzi yekuchinja, maparamita ekuita anofanirwa kunyatsotariswa uye kudzorwa, kuchena uye mhando yetungsten filament inofanirwa kuve nechokwadi, uye kuchengetedza kwakakodzera uye mapuroteni ekuongorora anofanirwa kuitwa kune iyo ion implantation michina. Kugara uchiongorora mamiriro uye kuita kwetambo ye tungsten kunogona kubatsira kuona chero zviratidzo zvekukanganisa uye kutora matanho ekugadzirisa sezvinodiwa.
