maualuga mama Ion implantation tungsten filament
Ion implantation tungsten uaea o se vaega autu o loʻo faʻaaogaina i masini faʻapipiʻi ion, aemaise lava i faiga gaosiga semiconductor. O lenei ituaiga o uaea tungsten e taua tele i masini semiconductor, ma o lona tulaga lelei ma le faatinoga e aafia tonu ai le lelei o laina IC process. Ion implantation machine o se meafaigaluega autu i le gaosiga o le gaosiga o le VLSI (Very Large Scale Integrated Circuit), ma o le matafaioi a le uaea tungsten e avea o se puna ion e le mafai ona le amanaiaina. ?
| Fua | E pei o au ata tusi |
| Nofoaga na Afua mai ai | Luoyang, Henan |
| Igoa Fa'ailoga | FGD |
| Fa'atatauga | semiconductor |
| Laufanua | Pa'u uliuli, fufulu alkali, iila taavale, fa'aiila |
| mama | 99.95% |
| Meafaitino | W1 |
| Malosi | 19.3g/cm3 |
| Tulaga fa'atinoina | GB/T 4181-2017 |
| Liu liusuavai | 3400 ℃ |
| mea le mama | 0.005% |
| Vaega autu | W＞99.95% |
| mea le mama≤ | |
| Pb | 0.0005 |
| Fe | 0.0020 |
| S | 0.0050 |
| P | 0.0005 |
| C | 0.01 |
| Cr | 0.0010 |
| Al | 0.0015 |
| Cu | 0.0015 |
| K | 0.0080 |
| N | 0.003 |
| Sn | 0.0015 |
| Si | 0.0020 |
| Ca | 0.0015 |
| Na | 0.0020 |
| O | 0.008 |
| Ti | 0.0010 |
| Mg | 0.0010 |
1. O lo matou fale gaosi oloa o loʻo i Luoyang City, Henan Province. Luoyang o se nofoaga gaosiga mo mines tungsten ma molybdenum, o lea e i ai a matou tulaga lelei atoatoa i le lelei ma le tau;
2. O la matou kamupani o loʻo i ai tagata faʻapitoa faʻapitoa ma sili atu i le 15 tausaga o le poto masani, ma matou te tuʻuina atu fofo ma fautuaga mo manaʻoga o tagata taʻitasi.
3. O a matou oloa uma e faʻataʻitaʻiina le lelei o asiasiga aʻo leʻi auina atu i fafo.
4. Afai e te mauaina ni mea leaga, e mafai ona e faʻafesoʻotaʻi mai mo se toe faʻafoʻi.
1. Filifiliga mea mata'utia
(Filifili mea e sili ona lelei tungsten mata e faʻamautinoa ai le mama ma mea faʻainisinia o le oloa mulimuli. )
2. Liusuavai ma le Fa'amamāina
(O mea faʻapitoa tungsten filifilia e faʻafefeteina i totonu o se siosiomaga faʻatonutonu e aveese ai mea leaga ma ausia le mama manaʻomia.)
3. Ata uaea
(O mea faʻamama tungsten e faʻapipiʻiina pe tosoina e ala i se faasologa o oti e ausia ai le lautele o le uaea manaʻomia ma mea faʻainisinia.)
4. Fa'asu'e
(O le uaea tungsten ua faʻapipiʻiina e faʻaumatia ai le faʻalavelave i totonu ma faʻaleleia lona gaogao ma le gaioiga faʻatinoga )
5. Fa'agasologa o le Fa'atupuina o Ion
I lenei tulaga faʻapitoa, o le filament tungsten lava ia e mafai ona oʻo i se faiga faʻapipiʻi ion, lea e tui ai ion i luga o le filament tungsten e suia ai ona meatotino e faʻaleleia ai le faʻatinoga i le ion implanter.)
I le faagasologa o le gaosiga o chip semiconductor, o le masini faʻapipiʻi ion o se tasi lea o meafaigaluega autu e faʻaaogaina e faʻafeiloaʻi ai le ata vaʻavaʻavaʻa mai le matapulepule i le wafer silicon ma ausia ai le galuega faʻatatau. O lenei faagasologa e aofia ai laasaga e pei o le faʻamalo faʻainisinia, faʻapipiʻi ata manifinifi, photolithography, etching, ma le faʻapipiʻiina o le ion, lea e aofia ai le faʻapipiʻiina o le ion o se tasi lea o auala taua e faʻaleleia ai le faʻatinoina o faʻamaʻi silicon. O le faʻaogaina o masini faʻapipiʻi ion e pulea lelei le taimi ma le tau o le gaosiga o chip, aʻo faʻaleleia le faʻatinoga ma le faʻamaoni o tupe meataalo. ?
Ioe, o filaments tungsten e faigofie ona faʻaleagaina i le taimi o le faʻaogaina o le ion. E mafai ona tupu le fa'aleagaina ona o mea eseese, e pei o kasa o totoe, vaega, po'o mea le mama o lo'o i totonu o le potu fa'apipi'i. O nei mea leaga e mafai ona pipii i luga o le filament tungsten, e aʻafia ai lona mama ma ono aʻafia ai le faʻatinoga o le faʻaogaina o le ion implantation process. O le mea lea, o le tausia o se siosiomaga mama ma pulea i totonu o le potu faʻapipiʻi ion e taua tele i le faʻaitiitia o le lamatiaga o le faʻaleagaina ma faʻamautinoa le faʻamaoni o le filament tungsten. E mafai fo'i ona fesoasoani faiga fa'amama ma fa'aleleia faifaipea e fa'aitiitia ai le ono fa'aleagaina i le taimi o le fa'apipi'iina o ion.
O le uaea tungsten ua lauiloa ona o le maualuga o le liusuavai ma le lelei o mea tau masini, lea e mafai ai ona tetee atu i le faʻaleagaina i lalo o tulaga masani faʻapipiʻi ion. Ae ui i lea, o le vevela e faʻatupuina i le taimi o le osofaʻia o le ion ma le faʻapipiʻiina o le ion e mafai ona mafua ai le faʻalavelave i le taimi, aemaise lava pe a le faʻatonutonuina ma le faʻaeteete ia faʻasologa o gaioiga.
O mea e pei o le malosi ma le umi o le ion beam ma le vevela ma le faʻalavelave maualuga e maua e le uaea tungsten e mafai ona fesoasoani uma i le mafai ona faʻaleagaina. E le gata i lea, o soʻo se mea leaga poʻo ni faaletonu i le uaea tungsten o le a faʻateleina ai le faʻalavelave i le faʻaleagaina.
Ina ia faʻaitiitia le lamatiaga o le faʻaleagaina, e tatau ona mataʻituina ma le faʻaeteete ia faʻasologa o le faagasologa, e tatau ona faʻamautinoa le mama ma le lelei o le filament tungsten, ma e tatau ona faʻatinoina le faʻaleleia ma le siakiina o faʻamaumauga mo meafaigaluega faʻapipiʻi ion. Iloiloga masani le tulaga ma le faatinoga o le uaea tungsten e mafai ona fesoasoani e iloa soʻo se faʻailoga o faʻalavelave ma faia faʻatonuga pe a manaʻomia.
