Kuyeretsa kwakukulu kwa titaniyamu sputtering chandamale cha zokutira vacuum
Zolinga za sputter ndi zida zoyera kwambiri zomwe zimagwiritsidwa ntchito popanga vapor deposition (PVD), makamaka ukadaulo wa sputtering. Zidazi zimagwiritsidwa ntchito popanga mafilimu opyapyala pamagawo osiyanasiyana m'mafakitale osiyanasiyana, kuphatikiza kupanga semiconductor, zokutira zowoneka bwino, komanso kuyika filimu yopyapyala pazida zamagetsi.
Zida zopangira sputter zitha kupangidwa kuchokera kuzinthu zosiyanasiyana ndi zinthu, kuphatikiza zitsulo, aloyi, ma oxides ndi nitrides. Kusankhidwa kwa chandamale cha sputter kumatengera zomwe zimafunikira pakupaka filimu yopyapyala, monga madutsidwe amagetsi, mawonekedwe owoneka bwino, kuuma komanso kukana kwamankhwala.
Zolinga zomwe zimagwiritsidwa ntchito kawirikawiri zimaphatikizapo zitsulo monga titaniyamu, aluminiyamu ndi mkuwa, komanso mankhwala monga indium tin oxide (ITO) ndi zitsulo zosiyanasiyana. Kusankha zinthu zoyenera kuponyedwa ndi sputtering ndikofunikira kuti mukwaniritse zomwe mukufuna ndikuchita kwa zokutira zopyapyala zamakanema.
Zolinga za sputtering zimabwera mosiyanasiyana kutengera zomwe zimafunikira pakuyika filimu yopyapyala ndi zida zolazira. Kukula kwa chandamale cha sputtering kumatha kukhala kuyambira masentimita angapo mpaka masentimita makumi awiri m'mimba mwake, ndipo makulidwe ake amathanso kusiyanasiyana.
Kukula kwa chandamale cha sputtering kumatsimikiziridwa ndi zinthu monga kukula kwa gawo lapansi lomwe liyenera kuphimbidwa, makonzedwe a dongosolo la sputtering, ndi mlingo wofunidwa woyika ndi kufanana. Kuonjezera apo, kukula kwa chandamale cha sputtering kungakhudzidwe ndi zofunikira zenizeni za filimu yopyapyala, monga malo oti aphimbidwe ndi magawo onse a ndondomeko.
Pamapeto pake, kukula kwa chandamale cha sputter kumasankhidwa kuti awonetsetse kuti filimuyo imagwira ntchito moyenera komanso yofananira pagawo laling'ono, kukwaniritsa zosowa zenizeni za filimu yopyapyala mukupanga semiconductor, zokutira zowoneka bwino ndi ntchito zina zofananira.
Pali njira zingapo zowonjezerera kuchuluka kwa sputtering mu ndondomeko ya sputtering:
1. Kukhathamiritsa kwa Mphamvu ndi Kupanikizika: Kusintha mphamvu ndi kukakamiza magawo mu dongosolo la sputtering kungakhudze mlingo wa sputtering. Kuchulukitsa mphamvu ndi kukhathamiritsa kupanikizika kumatha kupangitsa kuti sputtering ichuluke, zomwe zimapangitsa kuti filimu yopyapyala ikhale yofulumira.
2. Zida Zowunikira ndi Geometry: Kugwiritsa ntchito sputtering targets ndi optimized material composition and geometry kungawongolere sputtering rate. Zolinga zapamwamba kwambiri, zopangidwa mwaluso zimatha kukulitsa luso la sputtering ndikupangitsa kuti pakhale mitengo yokwera kwambiri.
3. Kukonzekera Pamwamba Pamwamba: Kuyeretsa bwino ndi kukonza malo omwe amawombera amatha kuthandizira kuwonjezereka kwa sputtering. Kuwonetsetsa kuti malo omwe chandamale ndi opanda zowononga komanso ma oxides amatha kupititsa patsogolo kutulutsa bwino.
4. Kutentha kwa gawo lapansi: Kuwongolera kutentha kwa gawo lapansi kumatha kukhudza kuchuluka kwa sputtering. Nthawi zina, kukweza kutentha kwa gawo lapansi mkati mwamitundu ingapo kungayambitse kuchulukirachulukira komanso kuwongolera filimu.
5. Kuyenda kwa Gasi ndi Mapangidwe: Kupititsa patsogolo kayendedwe ka gasi ndi kapangidwe kake mu chipinda cha sputtering kungakhudze mlingo wa sputtering. Kusintha kuchuluka kwa gasi ndikugwiritsa ntchito kusakaniza koyenera kwa gasi kumatha kupititsa patsogolo ntchito ya sputtering.
Poganizira mozama zinthu izi ndi kukhathamiritsa magawo a sputtering, ndizotheka kuwonjezera kuchuluka kwa sputtering ndikuwongolera magwiridwe antchito a filimu yopyapyala muzogwiritsa ntchito sputtering.
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