Kuyeretsa kwakukulu kwa Ion kuyika tungsten filament
Waya wa ion implantation tungsten ndi gawo lofunikira lomwe limagwiritsidwa ntchito pamakina oyika ion, makamaka popanga semiconductor. Waya wamtundu uwu wa tungsten umagwira ntchito yofunika kwambiri pazida za semiconductor, ndipo mtundu wake ndi magwiridwe ake zimakhudza mwachindunji magwiridwe antchito a mizere ya IC. Makina oyika ion ndi chida chofunikira popanga VLSI (Very Large Scale Integrated Circuit), ndipo gawo la waya wa tungsten ngati gwero la ion silinganyalanyazidwe. pa
| Makulidwe | Monga zojambula zanu |
| Malo Ochokera | Luoyang, Henan |
| Dzina la Brand | Chithunzi cha FGD |
| Kugwiritsa ntchito | semiconductor |
| Pamwamba | Khungu lakuda, kutsuka kwa alkali, kuwala kwagalimoto, kupukuta |
| Chiyero | 99.95% |
| Zakuthupi | W1 |
| Kuchulukana | 19.3g/cm3 |
| Miyezo ya kuphedwa | GB/T 4181-2017 |
| Malo osungunuka | 3400 ℃ |
| Zonyansa | 0.005% |
| Zigawo zazikulu | W ＞99.95% |
| Zonyansa≤ | |
| Pb | 0.0005 |
| Fe | 0.0020 |
| S | 0.0050 |
| P | 0.0005 |
| C | 0.01 |
| Cr | 0.0010 |
| Al | 0.0015 |
| Cu | 0.0015 |
| K | 0.0080 |
| N | 0.003 |
| Sn | 0.0015 |
| Si | 0.0020 |
| Ca | 0.0015 |
| Na | 0.0020 |
| O | 0.008 |
| Ti | 0.0010 |
| Mg | 0.0010 |
1. Fakitale yathu ili mumzinda wa Luoyang, m'chigawo cha Henan. Luoyang ndi malo opangira migodi ya tungsten ndi molybdenum, kotero tili ndi zabwino zonse mumtundu ndi mtengo;
2. Kampani yathu ili ndi anthu ogwira ntchito zaluso omwe ali ndi zaka zopitilira 15, ndipo timapereka mayankho ndi malingaliro omwe amafunikira kwa kasitomala aliyense.
3. Zogulitsa zathu zonse zimawunikiridwa mosamalitsa musanatumizidwe kunja.
4. Ngati mulandira katundu wolakwika, mungathe kulankhulana nafe kuti mubwezedwe.
1.Kusankha kwazinthu zopangira
(Sankhani zida zapamwamba za tungsten kuti muwonetsetse chiyero ndi makina a chinthu chomaliza.)
2. Kusungunula ndi Kuyeretsa
(Zinthu zosankhidwa za tungsten zimasungunuka m'malo olamulidwa kuti zichotse zonyansa ndikukwaniritsa chiyero chomwe mukufuna.)
3. Kujambula kwawaya
(Zinthu zoyeretsedwa za tungsten zimatulutsidwa kapena kukokedwa kudzera m'mafa angapo kuti mukwaniritse ma waya ofunikira ndi makina amakina.)
4.Annealing
(Waya wokokedwa wa tungsten umatsekeredwa kuti athetse kupsinjika kwamkati ndikuwongolera ductility ndi magwiridwe antchito)
5. Njira Yoyikira Ion
Pachifukwa ichi, ulusi wa tungsten wokha ukhoza kuchitidwa ndi ion implantation, momwe ma ion amabadwira pamwamba pa tungsten filament kuti asinthe mawonekedwe ake kuti apititse patsogolo ntchito mu implanter ion.)
Pakupanga chip cha semiconductor, makina oyika ion ndi chimodzi mwazinthu zofunika kwambiri zomwe zimagwiritsidwa ntchito kusamutsa chithunzi cha chip circuit kuchokera ku chigoba kupita ku chowotcha cha silicon ndikukwaniritsa zomwe mukufuna kuchita. Izi zimaphatikizapo masitepe monga kupukuta kwamakina, kuyika filimu yopyapyala, fotolithography, etching, ndi kuyika kwa ion, komwe kuyika kwa ion ndi njira imodzi yofunika kwambiri yopititsira patsogolo magwiridwe antchito a silicon wafers. Kugwiritsa ntchito makina oyika ion kumayang'anira bwino nthawi ndi mtengo wopangira chip, ndikuwongolera magwiridwe antchito ndi kudalirika kwa tchipisi. pa
Inde, ma tungsten filaments amatha kuipitsidwa panthawi ya ion implantation. Kuipitsidwa kumatha kuchitika chifukwa cha zinthu zosiyanasiyana, monga mpweya wotsalira, tinthu tating'onoting'ono, kapena zonyansa zomwe zimapezeka m'chipinda choyikira ion. Zowonongekazi zimatha kumamatira pamwamba pa tungsten filament, zomwe zimakhudza chiyero chake komanso zomwe zingakhudze momwe ntchito yoyika ion implantation imagwirira ntchito. Choncho, kusunga malo oyera ndi olamulidwa mkati mwa chipinda cha ion implantation ndikofunikira kuti kuchepetsa chiopsezo cha kuipitsidwa ndikuwonetsetsa kukhulupirika kwa tungsten filament. Njira zoyeretsera ndi kukonza nthawi zonse zingathandizenso kuchepetsa kuthekera kwa kuipitsidwa pakuyika ion.
Waya wa Tungsten umadziwika chifukwa cha malo ake osungunuka kwambiri komanso makina abwino kwambiri, omwe amaupangitsa kuti usakane kupindika pansi pamikhalidwe yokhazikika ya ion. Komabe, kutentha komwe kumapangidwa panthawi ya bombardment yamphamvu kwambiri ya ion bombardment ndi implantation ya ion kumatha kusokoneza pakapita nthawi, makamaka ngati magawo amachitidwe sakuyendetsedwa bwino.
Zinthu monga kulimba ndi kutalika kwa mtengo wa ion ndi kutentha ndi kupsinjika komwe amakumana ndi waya wa tungsten zitha kupangitsa kuti pakhale kusintha. Kuphatikiza apo, zonyansa zilizonse kapena zolakwika zilizonse mu waya wa tungsten zidzakulitsa chiwopsezo cha kupunduka.
Kuti muchepetse chiwopsezo cha kupunduka, magawo azinthu ayenera kuyang'aniridwa ndikuwongolera, chiyero ndi mtundu wa ulusi wa tungsten uyenera kutsimikiziridwa, ndipo ndondomeko yoyenera yosamalira ndi kuyang'anira iyenera kukhazikitsidwa pazida zoyikira ion. Kuwunika pafupipafupi momwe waya wa tungsten amagwirira ntchito kungathandize kuzindikira zizindikiro zilizonse zosokonekera ndikuchitapo kanthu koyenera.
