Muaj cov huab cua ion beam hnyav rau hauv cov khoom siv, cov ion beam rau cov khoom siv atoms lossis cov khoom siv rau hauv cov khoom siv nto, qhov tshwm sim no hu ua ion beam sputtering; thiab thaum cov khoom siv, qhov saum npoo ntawm cov khoom thaws rov qab, los yog tawm ntawm cov khoom siv rau cov phenomena yog hu ua tawg; muaj lwm qhov tshwm sim yog tias tom qab ion beam mus rau cov khoom siv los ntawm cov khoom siv thiab txo qhov kev tiv thaiv maj mam, thiab thaum kawg nyob hauv cov khoom siv, qhov tshwm sim no hu ua ion implantation.
Ion implantation txheej txheem:
Nws yog ib hom khoom siv hluav taws xob hloov kho tshuab uas tau tsim sai thiab dav siv hauv ntiaj teb hauv 30 xyoo dhau los. Lub hauv paus ntsiab lus tseem ceeb yog siv lub zog ntawm ion beam teeb meem rau qhov kev txiav txim ntawm 100keV cov ntaub ntawv rau ion beam thiab cov ntaub ntawv ntawm cov atoms los yog molecules yuav yog ib tug series ntawm lub cev thiab tshuaj sib cuam tshuam, qhov teeb meem ion zog poob maj mam, qhov kawg nres hauv cov khoom siv, thiab ua rau cov qauv thiab cov khoom ntawm cov khoom nto muaj pes tsawg leeg, hloov. Txhawm rau txhim kho qhov zoo ntawm cov khoom ntawm cov khoom, lossis kom tau txais qee yam khoom tshiab. Cov thev naus laus zis tshiab vim nws qhov tshwj xeeb zoo, tau nyob hauv cov khoom siv doped semiconductor, hlau, ceramic, polymer, kev hloov kho saum npoo yog dav siv, tau ua tiav kev lag luam thiab kev sib raug zoo.
Ion implantation raws li ib qho tseem ceeb doping technology nyob rau hauv micro electronics technology plays lub luag hauj lwm tseem ceeb nyob rau hauv optimizing lub nto thaj chaw ntawm cov ntaub ntawv. Ion implantation thev naus laus zis yog qhov ua tau zoo ntawm qhov kub thiab txias thiab ua rau cov tshuaj tiv thaiv corrosion ntawm cov khoom. Yog li ntawd, qhov tseem ceeb ntawm lub ionization chamber yog ua los ntawm tungsten, molybdenum los yog graphite cov ntaub ntawv. Gemei xyoo ntawm kev lag luam kev tshawb fawb thiab kev tsim khoom los ntawm ion implantation ntawm tungsten molybdenum khoom, cov txheej txheem ntau lawm muaj kev ruaj khov thiab kev nplua nuj.
Cov khoom kub rau Ion Implantation
