High purity Ion implantation tungsten filament
Ion implantation tungsten hlau yog ib qho tseem ceeb siv nyob rau hauv ion implantation machines, feem ntau nyob rau hauv semiconductor manufacturing txheej txheem. Hom tungsten hlau no ua lub luag haujlwm tseem ceeb hauv cov khoom siv semiconductor, thiab nws qhov kev ua tau zoo thiab kev ua haujlwm ncaj qha cuam tshuam rau kev ua haujlwm ntawm IC txheej txheem kab. Ion implantation tshuab yog cov cuab yeej tseem ceeb hauv kev tsim cov txheej txheem ntawm VLSI (Very Large Scale Integrated Circuit), thiab lub luag haujlwm ntawm tungsten hlau raws li qhov chaw ion tsis tuaj yeem tsis quav ntsej. cov
| Qhov ntev | Raws li koj cov duab kos |
| Qhov Chaw Keeb Kwm | Luoyang, Henan |
| Hom Lub Npe | FGD |
| Daim ntawv thov | semiconductor |
| Nto | Cov tawv nqaij dub, alkali ntxuav, tsheb ci, polished |
| Purity | 99.95% |
| Khoom siv | W1 |
| Qhov ntom | 19.3g / cm3 |
| Cov qauv kev ua haujlwm | GB/T 4181-2017 |
| Melting point | 3400 ℃ |
| Cov ntsiab lus impurity | 0.005% |
| Cov khoom tseem ceeb | W ≥ 99.95% |
| Cov ntsiab lus impurity ≤ | |
| Pb | 0.0005 |
| Fe | 0.0020 Nws |
| S | 0.0050 Nws |
| P | 0.0005 |
| C | 0.01 ib |
| Cr | 0.0010 Nws |
| Al | 0.0015 Nws |
| Cu | 0.0015 Nws |
| K | 0.008 0 |
| N | 0.003 ib |
| Sn | 0.0015 Nws |
| Si | 0.0020 Nws |
| Ca | 0.0015 Nws |
| Na | 0.0020 Nws |
| O | 0.008 ib |
| Ti | 0.0010 Nws |
| Mg | 0.0010 Nws |
1. Peb lub Hoobkas nyob hauv Luoyang City, Henan Province. Luoyang yog thaj chaw tsim khoom rau tungsten thiab molybdenum mines, yog li peb muaj qhov zoo ntawm qhov zoo thiab tus nqi;
2. Peb lub tuam txhab muaj cov kws tshaj lij nrog ntau tshaj 15 xyoo kev paub, thiab peb muab cov kev daws teeb meem thiab cov lus qhia rau txhua tus neeg siv khoom xav tau.
3. Tag nrho peb cov khoom raug soj ntsuam nruj ua ntej xa tawm.
4. Yog tias koj tau txais cov khoom tsis raug, koj tuaj yeem tiv tauj peb kom them rov qab.
1.Raw khoom xaiv
(Xaiv cov ntaub ntawv zoo tungsten los xyuas kom meej qhov purity thiab mechanical zog ntawm cov khoom kawg. )
2. Melting thiab Purification
(Xaiv tungsten raw cov ntaub ntawv yog melted nyob rau hauv ib puag ncig tswj kom tshem tawm impurities thiab ua kom tiav qhov xav tau purity.)
3. Hlau kos duab
(Purified tungsten cov khoom yog extruded los yog kos los ntawm ib tug series ntawm tuag kom ua tau raws li qhov yuav tsum tau hlau txoj kab uas hla thiab txhua yam khoom.)
4.Kev sib tw
(Lub rub tawm tungsten hlau yog annealed kom tshem tawm cov kev ntxhov siab sab hauv thiab txhim kho nws cov ductility thiab kev ua haujlwm )
5. Ion Implantation txheej txheem
Hauv qhov tshwj xeeb no, tungsten filament nws tus kheej tuaj yeem dhau los ua cov txheej txheem ion implantation, uas ions raug txhaj rau hauv qhov chaw ntawm tungsten filament los hloov nws cov khoom los txhim kho kev ua haujlwm hauv ion implanter.)
Nyob rau hauv cov txheej txheem semiconductor nti ntau lawm, ion implantation tshuab yog ib qho ntawm cov khoom siv tseem ceeb uas siv los hloov daim duab hluav taws xob daim duab los ntawm daim npog ntsej muag mus rau silicon wafer thiab ua tiav lub hom phiaj nti ua haujlwm. Cov txheej txheem no suav nrog cov kauj ruam xws li tshuaj kho tshuab polishing, nyias zaj duab xis deposition, photolithography, etching, thiab ion implantation, uas ion implantation yog ib qho tseem ceeb txhais tau tias los txhim kho kev ua tau zoo ntawm silicon wafers. Daim ntawv thov ntawm ion implantation tshuab zoo tswj lub sijhawm thiab tus nqi ntawm cov chips ntau lawm, thaum txhim kho kev ua haujlwm thiab kev ntseeg siab ntawm cov chips. cov
Yog lawm, tungsten filaments raug cuam tshuam rau kev sib kis thaum lub sij hawm ion implantation txheej txheem. Kev kis kab mob tuaj yeem tshwm sim vim muaj ntau yam, xws li cov roj seem, cov khoom, lossis cov impurities uas muaj nyob hauv ion implantation chamber. Cov kab mob no tuaj yeem ua raws li qhov chaw ntawm tungsten filament, cuam tshuam rau nws cov purity thiab muaj feem cuam tshuam rau kev ua haujlwm ntawm ion implantation txheej txheem. Yog li ntawd, kev tswj kom huv thiab tswj ib puag ncig nyob rau hauv lub ion implantation chamber yog ib qho tseem ceeb kom txo tau txoj kev pheej hmoo ntawm kev kis kab mob thiab ua kom muaj kev ncaj ncees ntawm tungsten filament. Kev tu thiab tu cov txheej txheem tsis tu ncua kuj tseem tuaj yeem pab txo qhov muaj peev xwm ntawm kev sib kis thaum lub sij hawm ion implantation.
Tungsten hlau paub txog nws qhov siab melting point thiab zoo heev txhua yam khoom, uas ua rau nws resistant rau deformation nyob rau hauv ib txwm ion implantation tej yam kev mob. Txawm li cas los xij, cov cua sov tsim tawm thaum lub sij hawm muaj zog ion bombardment thiab ion implantation tuaj yeem ua rau muaj kev cuam tshuam rau lub sijhawm, tshwj xeeb tshaj yog tias cov txheej txheem tsis ua tib zoo tswj.
Cov yam ntxwv xws li kev siv zog thiab lub sij hawm ntawm ion beam thiab qhov kub thiab txias thiab kev ntxhov siab uas tau ntsib los ntawm tungsten hlau tuaj yeem ua rau muaj peev xwm deformation. Tsis tas li ntawd, txhua yam impurities lossis qhov tsis xws luag hauv tungsten hlau yuav ua rau muaj kev cuam tshuam rau deformation.
Txhawm rau txo qhov kev pheej hmoo ntawm deformation, cov txheej txheem tsis yuav tsum tau ua tib zoo saib xyuas thiab tswj xyuas, qhov purity thiab zoo ntawm tungsten filament yuav tsum tau ua kom ntseeg tau, thiab kev saib xyuas tsim nyog thiab kev soj ntsuam cov txheej txheem yuav tsum tau ua rau cov khoom siv ion implantation. Kev ntsuam xyuas tsis tu ncua thiab kev ua haujlwm ntawm tungsten hlau tuaj yeem pab txheeb xyuas cov cim qhia ntawm kev tsis sib haum xeeb thiab ua haujlwm kho raws li qhov xav tau.
