Kiʻekiʻe maʻemaʻe Ion implantation tungsten filament
ʻO Ion implantation tungsten wire kahi mea nui i hoʻohana ʻia i nā mīkini implantation ion, ka mea nui i nā kaʻina hana semiconductor. He mea koʻikoʻi kēia ʻano uea tungsten i nā lako semiconductor, a ʻo kona maikaʻi a me kāna hana e pili pono i ka pono o nā laina kaʻina IC. ʻO ka mīkini implantation Ion kahi mea nui i ka hana ʻana o VLSI (Very Large Scale Integrated Circuit), a ʻaʻole hiki ke nānā ʻia ke kuleana o ka uea tungsten ma ke ʻano he kumu ion. ?
| Anana | E like me kāu mau kaha kiʻi |
| Kahi i kumu | Luoyang, Henan |
| Kapa inoa | FGD |
| Palapala noi | semiconductor |
| Ili | ʻIli ʻeleʻele, holoi alkali, ʻālohilohi kaʻa, poli |
| Maemae | 99.95% |
| Mea waiwai | W1 |
| ʻO ka mānoanoa | 19.3g/cm3 |
| Nā kūlana hoʻokō | GB/T 4181-2017 |
| Lae hehee | 3400 ℃ |
| maʻiʻo haumia | 0.005% |
| Nā mea nui | W＞99.95% |
| maʻiʻo haumia≤ | |
| Pb | 0.0005 |
| Fe | 0.0020 |
| S | 0.0050 |
| P | 0.0005 |
| C | 0.01 |
| Cr | 0.0010 |
| Al | 0.0015 |
| Cu | 0.0015 |
| K | 0.0080 |
| N | 0.003 |
| Sn | 0.0015 |
| Si | 0.0020 |
| Ca | 0.0015 |
| Na | 0.0020 |
| O | 0.008 |
| Ti | 0.0010 |
| Mg | 0.0010 |
1. Aia kā mākou hale hana ma Luoyang City, Henan Province. He wahi hana ʻo Luoyang no nā mines tungsten a me molybdenum, no laila, loaʻa iā mākou nā mea maikaʻi loa i ka maikaʻi a me ke kumukūʻai;
2. Loaʻa i kā mākou hui nā limahana loea me ka ʻoi aku o 15 mau makahiki o ka ʻike, a hāʻawi mākou i nā hoʻonā a me nā manaʻo no kēlā me kēia mea kūʻai aku.
3. ʻO kā mākou huahana a pau e nānā pono i ka maikaʻi ma mua o ka lawe ʻia ʻana aku.
4. Inā loaʻa iāʻoe nā waiwai hemahema, hiki iāʻoe ke hoʻokaʻaʻike mai iā mākou no ka uku.
1.Raw mea koho
(E koho i nā mea waiwai tungsten kiʻekiʻe e hōʻoia i ka maʻemaʻe a me nā waiwai mechanical o ka huahana hope loa. )
2. Hehee a hoomaemae
(E hoʻoheheʻe ʻia nā mea waiwai tungsten i koho ʻia i kahi kaiapuni i hoʻopaʻa ʻia e wehe i nā haumia a loaʻa ka maʻemaʻe i makemake ʻia.)
3. Kii uwea
(Hoʻopuka ʻia nā mea tungsten hoʻomaʻemaʻe ʻia a huki ʻia ma o ke ʻano o ka make e hoʻokō ai i ke anawaena uea a me nā waiwai mechanical.)
4.Annealing
(Hoʻopili ʻia ka uea tungsten i huki ʻia e hoʻopau i ke koʻikoʻi o loko a hoʻomaikaʻi i kona ductility a me ka hana ʻana)
5. Ke Kaʻina Hoʻokomo Ion
I kēia hihia kūikawā, hiki i ka filament tungsten ke hana i kahi kaʻina hana implantation ion, kahi i hoʻokomo ʻia ai nā ion i ka ʻili o ka filament tungsten e hoʻololi i kāna mau waiwai e hoʻomaikaʻi i ka hana i ka implanter ion.)
Ma ke kaʻina hana hana semiconductor chip, ʻo ka mīkini implantation ion kekahi o nā mea nui i hoʻohana ʻia no ka hoʻololi ʻana i ka diagram circuit circuit mai ka mask i ka wafer silicon a hoʻokō i ka hana chip target. Aia i loko o kēia kaʻina hana nā ʻanuʻu e like me ka hoʻoliʻiliʻi ʻana i nā kemika, ka hoʻopaʻa ʻana i nā kiʻiʻoniʻoni lahilahi, photolithography, etching, a me ka hoʻokomo ʻana i ka ion, a ma waena o ka implantation ion kekahi o nā mea nui e hoʻomaikaʻi ai i ka hana o nā wafer silika. ʻO ka hoʻohana ʻana i nā mīkini implantation ion e hoʻomalu pono i ka manawa a me ke kumukūʻai o ka hana chip, ʻoiai e hoʻomaikaʻi ana i ka hana a me ka hilinaʻi o nā chips. ?
ʻAe, hiki ke hoʻopili ʻia nā filament tungsten i ka wā o ke kaʻina hana implantation. Hiki ke hoʻohaumia ma muli o nā ʻano kumu like ʻole, e like me ke koena kinoea, nā ʻāpana, a me nā haumia i loaʻa i loko o ke keʻena implantation ion. Hiki i kēia mau mea haumia ke hoʻopili i ka ʻili o ka filament tungsten, e pili ana i kona maʻemaʻe a hiki ke hoʻopili i ka hana o ke kaʻina hana implantation. No laila, ʻo ka mālama ʻana i kahi kaiapuni maʻemaʻe a hoʻomalu ʻia i loko o ke keʻena implantation ion he mea koʻikoʻi ia e hōʻemi i ka hopena o ka hoʻohaumia ʻana a me ka hōʻoia ʻana i ka pono o ka filament tungsten. Hiki i nā kaʻina hana hoʻomaʻemaʻe a me ka mālama ʻana ke kōkua i ka hoʻēmi ʻana i ka hiki ke hoʻopōʻino i ka wā o ka implantation ion.
Ua ʻike ʻia ka uea Tungsten no kona wahi heheʻe kiʻekiʻe a me nā waiwai mechanical maikaʻi loa, kahi e kū ai i ka deformation ma lalo o nā kūlana implantation ion maʻamau. Eia nō naʻe, ʻo ka wela i hana ʻia i ka wā o ka hoʻokuʻu ʻana i ka ikehu kiʻekiʻe a me ka hoʻokomo ʻana i ka ion hiki ke hoʻololi i ka manawa, ʻoiai inā ʻaʻole mālama pono ʻia nā ʻāpana kaʻina.
ʻO nā mea e like me ka ikaika a me ka lōʻihi o ka ion beam a me ka mahana a me ke koʻikoʻi i ʻike ʻia e ka uea tungsten hiki ke kōkua i ka hiki ke hoʻololi. Eia kekahi, ʻo nā mea haumia a i ʻole nā hemahema i ka uea tungsten e hoʻonui i ka maʻalahi i ka deformation.
I mea e hōʻemi ai i ka hopena o ka deformation, pono e nānā pono ʻia nā ʻāpana kaʻina hana, pono e hōʻoia ʻia ka maʻemaʻe a me ka maikaʻi o ka filament tungsten, a pono e hoʻokō ʻia nā protocol mālama pono a me ka nānā ʻana no nā lako implantation ion. ʻO ka loiloi mau ʻana i ke kūlana a me ka hana ʻana o ka uea tungsten hiki ke kōkua i ka ʻike ʻana i nā hōʻailona o ka distortion a hana i nā hana hoʻoponopono inā pono.
